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	ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication
	Cao Zhengcai; Zhao Huidan; Wang Yongji
刊名	CHINESE JOURNAL OF ELECTRONICS
	2013
卷号	22期号:[db:dc_citation_issue]页码:25-30
关键词	Semiconductor manufacturing system Scheduling Adaptive neuro-fuzzy inference system Simulated annealing algorithm
ISSN号	1022-4653
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3306903
专题	西安交通大学
推荐引用方式 GB/T 7714	Cao Zhengcai,Zhao Huidan,Wang Yongji. ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication[J]. CHINESE JOURNAL OF ELECTRONICS,2013,22([db:dc_citation_issue]):25-30.
APA	Cao Zhengcai,Zhao Huidan,&Wang Yongji.(2013).ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication.CHINESE JOURNAL OF ELECTRONICS,22([db:dc_citation_issue]),25-30.
MLA	Cao Zhengcai,et al."ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication".CHINESE JOURNAL OF ELECTRONICS 22.[db:dc_citation_issue](2013):25-30.

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