Fabrication of compact turning mirrors in silicon-on-insulator materials

	Fabrication of compact turning mirrors in silicon-on-insulator materials
	Wang,WH ; Tang,YZ ; Li,T ; Wu,YM ; Yang,JY ; Wang,YL
刊名	APPLIED OPTICS
	2005
卷号	44 期号:12 页码:2409-2415
关键词	RIB WAVE-GUIDES CORNER-MIRRORS DEMULTIPLEXER
ISSN号	0003-6935
通讯作者	Wang, WH, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducter Technol, Shanghai 200050, Peoples R China
学科主题	Optics
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38866]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Wang,WH,Tang,YZ,Li,T,et al. Fabrication of compact turning mirrors in silicon-on-insulator materials[J]. APPLIED OPTICS,2005,44(12):2409-2415.
APA	Wang,WH,Tang,YZ,Li,T,Wu,YM,Yang,JY,&Wang,YL.(2005).Fabrication of compact turning mirrors in silicon-on-insulator materials.APPLIED OPTICS,44(12),2409-2415.
MLA	Wang,WH,et al."Fabrication of compact turning mirrors in silicon-on-insulator materials".APPLIED OPTICS 44.12(2005):2409-2415.