A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon | |
Duan, F ; Jiao, JW ; Wang, YC ; Zhang, Y ; Mi, BW ; Li, JP ; Wang, YL | |
刊名 | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
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2008 | |
卷号 | 14期号:7页码:1009-1013 |
关键词 | SBM PROCESS SILICON |
ISSN号 | 0946-7076 |
通讯作者 | Jiao, JW, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China |
学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2011-12-17 |
内容类型 | 期刊论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/38818] ![]() |
专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
推荐引用方式 GB/T 7714 | Duan, F,Jiao, JW,Wang, YC,et al. A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2008,14(7):1009-1013. |
APA | Duan, F.,Jiao, JW.,Wang, YC.,Zhang, Y.,Mi, BW.,...&Wang, YL.(2008).A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,14(7),1009-1013. |
MLA | Duan, F,et al."A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 14.7(2008):1009-1013. |
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