A novel all-light optically readable thermal imaging sensor based on MEMS technology

	A novel all-light optically readable thermal imaging sensor based on MEMS technology
	Fei,F ; Jiao,JW ; Bin,X ; Wang,YL
刊名	PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2
	2003
页码	513-516
ISSN号	1930-0395
通讯作者	Fei, F, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
学科主题	Engineering, Electrical & Electronic
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38717]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Fei,F,Jiao,JW,Bin,X,et al. A novel all-light optically readable thermal imaging sensor based on MEMS technology[J]. PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2,2003:513-516.
APA	Fei,F,Jiao,JW,Bin,X,&Wang,YL.(2003).A novel all-light optically readable thermal imaging sensor based on MEMS technology.PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2,513-516.
MLA	Fei,F,et al."A novel all-light optically readable thermal imaging sensor based on MEMS technology".PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2 (2003):513-516.