Design, fabrication and characterization of a front-etched micromachined thermopile for IR detection

	Design, fabrication and characterization of a front-etched micromachined thermopile for IR detection
	Xu, DH ; Xiong, B ; Wang, YL
刊名	JOURNAL OF MICROMECHANICS AND MICROENGINEERING
	2010
卷号	20 期号:11 页码:115004-115004
关键词	SENSORS SI
ISSN号	0960-1317
通讯作者	Xu, DH, Chinese Acad Sci, State Key Lab Transducer Technol Sci & Technol, Microsyst Lab, Shanghai Inst Microsyst & Informat Technol, 865 Changning Rd, Shanghai 200050, Peoples R China
学科主题	Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38371]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Xu, DH,Xiong, B,Wang, YL. Design, fabrication and characterization of a front-etched micromachined thermopile for IR detection[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2010,20(11):115004-115004.
APA	Xu, DH,Xiong, B,&Wang, YL.(2010).Design, fabrication and characterization of a front-etched micromachined thermopile for IR detection.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,20(11),115004-115004.
MLA	Xu, DH,et al."Design, fabrication and characterization of a front-etched micromachined thermopile for IR detection".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 20.11(2010):115004-115004.