A High-Performance Dual-Cantilever High-Shock Accelerometer Single-Sided Micromachined in (111) Silicon Wafers

	A High-Performance Dual-Cantilever High-Shock Accelerometer Single-Sided Micromachined in (111) Silicon Wafers
	Wang, JC ; Li, XX
刊名	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
	2010
卷号	19 期号:6 页码:1515-1520
关键词	FABRICATION SENSORS
ISSN号	1057-7157
通讯作者	Wang, JC, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol & Sci, Shanghai 200050, Peoples R China
学科主题	Engineering, Electrical & Electronic; Engineering, Mechanical
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38362]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Wang, JC,Li, XX. A High-Performance Dual-Cantilever High-Shock Accelerometer Single-Sided Micromachined in (111) Silicon Wafers[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2010,19(6):1515-1520.
APA	Wang, JC,&Li, XX.(2010).A High-Performance Dual-Cantilever High-Shock Accelerometer Single-Sided Micromachined in (111) Silicon Wafers.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,19(6),1515-1520.
MLA	Wang, JC,et al."A High-Performance Dual-Cantilever High-Shock Accelerometer Single-Sided Micromachined in (111) Silicon Wafers".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 19.6(2010):1515-1520.