QQ客服 官方微博 反馈留言

	A low-g MEMS inertial switch with a novel radial electrode for uniform omnidirectional sensitivity
	Du Liqun; Li Yu; Zhao Jian; Wang Weitai; Zhao Wenjun; Zhao Wen; Zhu Heqing
刊名	SENSORS AND ACTUATORS A-PHYSICAL
	2018
卷号	270页码:214-222
关键词	Low-g omnidirectional inertial switch Novel radial electrode Non-silicon surface micromachining Thickness compensation Anti-overload performance
ISSN号	0924-4247
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3274062
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Sch Mech Engn, Dalian 116024, Peoples R China. 2.Dalian Univ Technol, Sch Automot Engn, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Du Liqun,Li Yu,Zhao Jian,et al. A low-g MEMS inertial switch with a novel radial electrode for uniform omnidirectional sensitivity[J]. SENSORS AND ACTUATORS A-PHYSICAL,2018,270:214-222.
APA	Du Liqun.,Li Yu.,Zhao Jian.,Wang Weitai.,Zhao Wenjun.,...&Zhu Heqing.(2018).A low-g MEMS inertial switch with a novel radial electrode for uniform omnidirectional sensitivity.SENSORS AND ACTUATORS A-PHYSICAL,270,214-222.
MLA	Du Liqun,et al."A low-g MEMS inertial switch with a novel radial electrode for uniform omnidirectional sensitivity".SENSORS AND ACTUATORS A-PHYSICAL 270(2018):214-222.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。