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	Effects of oxygen flows on optical properties, micro-structure and residual stress of Ta2O5 films deposited by DIBS
	Lv, Qipeng; Huang, Mingliang; Deng, Songwen; Zhang, Shaoqian; Li, Gang
刊名	OPTIK
	2018
卷号	166页码:278-284
关键词	Ion beam sputtering Ta2O5 film Oxygen flow Optical properties Residual stress
ISSN号	0030-4026
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3271387
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Sch Mat Sci & Engn, Dalian 116024, Peoples R China. 2.Chinese Acad Sci, Dalian Inst Chem Phys, Key Lab Chem Lasers, Dalian 116023, Peoples R China. 3.Dalian Univ Technol, Sch Mat Sci & Engn, Dalian 116024, Peoples R China. 4.Chinese Acad Sci, Dalian Inst Chem Phys, Key Lab Chem Lasers, Dalian 116023, Peoples R China.
推荐引用方式 GB/T 7714	Lv, Qipeng,Huang, Mingliang,Deng, Songwen,et al. Effects of oxygen flows on optical properties, micro-structure and residual stress of Ta2O5 films deposited by DIBS[J]. OPTIK,2018,166:278-284.
APA	Lv, Qipeng,Huang, Mingliang,Deng, Songwen,Zhang, Shaoqian,&Li, Gang.(2018).Effects of oxygen flows on optical properties, micro-structure and residual stress of Ta2O5 films deposited by DIBS.OPTIK,166,278-284.
MLA	Lv, Qipeng,et al."Effects of oxygen flows on optical properties, micro-structure and residual stress of Ta2O5 films deposited by DIBS".OPTIK 166(2018):278-284.

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