| A high performance micro-pressure sensor based on a double-ended quartz tuning fork and silicon diaphragm in atmospheric packaging | |
| Cheng, Rongjun; Li, Cun; Zhao, Yulong; Li, Bo; Tian, Bian | |
| 2015 | |
| 关键词 | silicon packaging quartz resonant micro-pressure sensor MEMS |
| 卷号 | 26 |
| 期号 | [db:dc_citation_issue] |
| DOI | [db:dc_identifier_doi] |
| 会议录 | MEASUREMENT SCIENCE AND TECHNOLOGY
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| URL标识 | 查看原文 |
| ISSN号 | 0957-0233 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3270462 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Cheng, Rongjun,Li, Cun,Zhao, Yulong,et al. A high performance micro-pressure sensor based on a double-ended quartz tuning fork and silicon diaphragm in atmospheric packaging[C]. 见:. |
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