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	Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O2 inductively coupled plasma
	Gao F(高飞); Wang YN(王友年)
刊名	J. Appl. Phys.
	2018
卷号	125页码:23303-23303
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3250914
专题	大连理工大学
推荐引用方式 GB/T 7714	Gao F,Wang YN. Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O2 inductively coupled plasma[J]. J. Appl. Phys.,2018,125:23303-23303.
APA	Gao F,&Wang YN.(2018).Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O2 inductively coupled plasma.J. Appl. Phys.,125,23303-23303.
MLA	Gao F,et al."Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O2 inductively coupled plasma".J. Appl. Phys. 125(2018):23303-23303.

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