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	Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures
	Ren, Juan; Ward, Michael; Kinnell, Peter; Craddock, Russell; Wei, Xueyong
刊名	SENSORS
	2016
卷号	16期号:[db:dc_citation_issue]
关键词	pressure sensor single crystal silicon microfabrication plastic deformation
ISSN号	1424-8220
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3231751
专题	西安交通大学
推荐引用方式 GB/T 7714	Ren, Juan,Ward, Michael,Kinnell, Peter,et al. Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures[J]. SENSORS,2016,16([db:dc_citation_issue]).
APA	Ren, Juan,Ward, Michael,Kinnell, Peter,Craddock, Russell,&Wei, Xueyong.(2016).Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures.SENSORS,16([db:dc_citation_issue]).
MLA	Ren, Juan,et al."Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures".SENSORS 16.[db:dc_citation_issue](2016).

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