| Photoelectrochemical mechanical polishing method for n-type gallium nitride | |
| Dong, Zhigang; Ou, Liwei; Kang, Renke; Hu, Huiqin; Zhang, Bi; Guo, Dongming; Shi, Kang | |
| 刊名 | CIRP ANNALS-MANUFACTURING TECHNOLOGY
 |
| 2019 | |
| 卷号 | 68页码:205-208 |
| 关键词 | Polishing Damage Gallium nitride |
| ISSN号 | 0007-8506 |
| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3231427 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China. 2.Xiamen Univ, Coll Chem & Chem Engn, Minist Educ, Engn Res Ctr Electrochem Technol, Xiamen 361005, Fujian, Peoples R China. 3.South Univ Sci & Technol, Dept Mech & Energy Engn, Shenzhen 518055, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Dong, Zhigang,Ou, Liwei,Kang, Renke,et al. Photoelectrochemical mechanical polishing method for n-type gallium nitride[J]. CIRP ANNALS-MANUFACTURING TECHNOLOGY,2019,68:205-208. |
| APA | Dong, Zhigang.,Ou, Liwei.,Kang, Renke.,Hu, Huiqin.,Zhang, Bi.,...&Shi, Kang.(2019).Photoelectrochemical mechanical polishing method for n-type gallium nitride.CIRP ANNALS-MANUFACTURING TECHNOLOGY,68,205-208. |
| MLA | Dong, Zhigang,et al."Photoelectrochemical mechanical polishing method for n-type gallium nitride".CIRP ANNALS-MANUFACTURING TECHNOLOGY 68(2019):205-208. |
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