| Fluid simulation of the plasma uniformity in pulsed dual frequency inductively coupled plasma | |
| Sun, Xiao-Yan; Zhang, Yu-Ru; Chai, Sen; Wang, You-Nian; He, Jian-Xin | |
| 刊名 | PHYSICS OF PLASMAS
 |
| 2019 | |
| 卷号 | 26 |
| 关键词 | Antennas Diffusion in liquids Inductively coupled plasma Plasma density, Argon discharges Density profile Fluid simulations Plasma uniformity Power absorption Pulse duty cycle Radial uniformities Two Dimensional (2 D), Electric discharges |
| ISSN号 | 1070-664X |
| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3219332 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Zhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R China. 2.Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Sch Phys, Dalian 116024, Peoples R China. 3.China Special Equipment Inspect & Res Inst, Beijing 100000, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Sun, Xiao-Yan,Zhang, Yu-Ru,Chai, Sen,et al. Fluid simulation of the plasma uniformity in pulsed dual frequency inductively coupled plasma[J]. PHYSICS OF PLASMAS,2019,26. |
| APA | Sun, Xiao-Yan,Zhang, Yu-Ru,Chai, Sen,Wang, You-Nian,&He, Jian-Xin.(2019).Fluid simulation of the plasma uniformity in pulsed dual frequency inductively coupled plasma.PHYSICS OF PLASMAS,26. |
| MLA | Sun, Xiao-Yan,et al."Fluid simulation of the plasma uniformity in pulsed dual frequency inductively coupled plasma".PHYSICS OF PLASMAS 26(2019). |
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