Near-field microscopy inspection of nano scratch defects on the monocrystalline silicon surface | |
Yan, Ying; Wang, Yonghao; Zhou, Ping; Huang, Ning; Guo, Dongming | |
刊名 | PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
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2019 | |
卷号 | 56页码:506-512 |
关键词 | s-SNOM Surface defects Micro crack |
ISSN号 | 0141-6359 |
URL标识 | 查看原文 |
WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/3219275 |
专题 | 大连理工大学 |
作者单位 | Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China. |
推荐引用方式 GB/T 7714 | Yan, Ying,Wang, Yonghao,Zhou, Ping,et al. Near-field microscopy inspection of nano scratch defects on the monocrystalline silicon surface[J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,2019,56:506-512. |
APA | Yan, Ying,Wang, Yonghao,Zhou, Ping,Huang, Ning,&Guo, Dongming.(2019).Near-field microscopy inspection of nano scratch defects on the monocrystalline silicon surface.PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,56,506-512. |
MLA | Yan, Ying,et al."Near-field microscopy inspection of nano scratch defects on the monocrystalline silicon surface".PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 56(2019):506-512. |
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