Influence of hydrogen impurity on the resistivity of low temperature grown p-Al x Ga 1-x N layer (0.08 ? x ? 0.104)

	Influence of hydrogen impurity on the resistivity of low temperature grown p-Al x Ga 1-x N layer (0.08 ? x ? 0.104)
	Feng Liang; Ying Yang; Degang Zhao; Desheng Jiang; Zongshun Liu; Jianjun Zhu; Ping Chen; Wei Liu; Shuangtao Liu; Yao Xing; Liqun Zhang; Wenjie Wang; Mo Li; Yuantao Zhang; Guotong Du
刊名	Superlattices and microstructures
	2018
卷号	113 页码:720-725
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/29324]
专题	半导体研究所_光电子研究发展中心
推荐引用方式 GB/T 7714	Feng Liang;Ying Yang;Degang Zhao;Desheng Jiang;Zongshun Liu;Jianjun Zhu;Ping Chen;Wei Liu;Shuangtao Liu;Yao Xing;Liqun Zhang;Wenjie Wang;Mo Li;Yuantao Zhang;Guotong Du. Influence of hydrogen impurity on the resistivity of low temperature grown p-Al x Ga 1-x N layer (0.08 ? x ? 0.104)[J]. Superlattices and microstructures,2018,113:720-725.
APA	Feng Liang;Ying Yang;Degang Zhao;Desheng Jiang;Zongshun Liu;Jianjun Zhu;Ping Chen;Wei Liu;Shuangtao Liu;Yao Xing;Liqun Zhang;Wenjie Wang;Mo Li;Yuantao Zhang;Guotong Du.(2018).Influence of hydrogen impurity on the resistivity of low temperature grown p-Al x Ga 1-x N layer (0.08 ? x ? 0.104).Superlattices and microstructures,113,720-725.
MLA	Feng Liang;Ying Yang;Degang Zhao;Desheng Jiang;Zongshun Liu;Jianjun Zhu;Ping Chen;Wei Liu;Shuangtao Liu;Yao Xing;Liqun Zhang;Wenjie Wang;Mo Li;Yuantao Zhang;Guotong Du."Influence of hydrogen impurity on the resistivity of low temperature grown p-Al x Ga 1-x N layer (0.08 ? x ? 0.104)".Superlattices and microstructures 113(2018):720-725.