Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation | |
Wang, Xuewen1,2,3; Theogene, Barayavuga1,2; Mei, Huanhuan4; Zhang, Jianwei1,2; Huang, Chenchen1,2; Ren, Xiaoying1,2; Xu, Muxun1 | |
刊名 | FERROELECTRICS |
2019-09-10 | |
卷号 | 549期号:1(SI)页码:70-77 |
关键词 | Local anodic oxidation nanolithography atomic force microscope silicon surface |
ISSN号 | 0015-0193;1563-5112 |
DOI | 10.1080/00150193.2019.1592545 |
产权排序 | 3 |
英文摘要 | The AFM tip induced local anodic oxidation (LAO) nanolithography is capable of manufacturing nanometer scale structures and devices for future generation. Experimental studies of LAO on silicon surface, implemented in atmospheric environment by AFM, are presented in this paper. A series of nanostructures with complex patterns was fabricated and analyzed by AFM. The results indicated that various of parameters, such as the applied voltage, pulse time, and ambient humidity, have a strong impact on the height of the nanostructures generated in this way. An advantage of the presented approach is to be utilized in future processing steps in the same environment. |
语种 | 英语 |
出版者 | TAYLOR & FRANCIS LTD |
WOS记录号 | WOS:000494798800008 |
内容类型 | 期刊论文 |
源URL | [http://ir.opt.ac.cn/handle/181661/31916] |
专题 | 西安光学精密机械研究所_瞬态光学技术国家重点实验室 |
通讯作者 | Wang, Xuewen |
作者单位 | 1.Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Shaanxi, Peoples R China 2.Xi An Jiao Tong Univ, Shaanxi Key Lab Intelligent Robots, Xian, Shaanxi, Peoples R China 3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian, Shaanxi, Peoples R China 4.Changan Univ, Sch Construct Machinery, Xian, Shaanxi, Peoples R China |
推荐引用方式 GB/T 7714 | Wang, Xuewen,Theogene, Barayavuga,Mei, Huanhuan,et al. Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation[J]. FERROELECTRICS,2019,549(1(SI)):70-77. |
APA | Wang, Xuewen.,Theogene, Barayavuga.,Mei, Huanhuan.,Zhang, Jianwei.,Huang, Chenchen.,...&Xu, Muxun.(2019).Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation.FERROELECTRICS,549(1(SI)),70-77. |
MLA | Wang, Xuewen,et al."Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation".FERROELECTRICS 549.1(SI)(2019):70-77. |
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