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	Fabrication of aluminum nitride films by reactive pulse DC magnetron sputtering for vibration energy harvester
	Shang, Zhengguo[1,2]; Li, Dongling[1,2]; Wang, Shengqiang[1,2]
	2015
卷号	645页码:1133-1138
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3096130
专题	重庆大学
推荐引用方式 GB/T 7714	Shang, Zhengguo[1,2],Li, Dongling[1,2],Wang, Shengqiang[1,2]. Fabrication of aluminum nitride films by reactive pulse DC magnetron sputtering for vibration energy harvester[J],2015,645:1133-1138.
APA	Shang, Zhengguo[1,2],Li, Dongling[1,2],&Wang, Shengqiang[1,2].(2015).Fabrication of aluminum nitride films by reactive pulse DC magnetron sputtering for vibration energy harvester.,645,1133-1138.
MLA	Shang, Zhengguo[1,2],et al."Fabrication of aluminum nitride films by reactive pulse DC magnetron sputtering for vibration energy harvester".645(2015):1133-1138.

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