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	Design and fabrication of a MEMS high-efficiency NIR-scanning grating based on tilted (1 1 1) silicon wafer
	Nie, Qiuyu[1,2,3]; Wen, Zhiyu[1,2]; Huang, Jian[1,2]
	2015
卷号	72
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3050333
专题	重庆大学
推荐引用方式 GB/T 7714	Nie, Qiuyu[1,2,3],Wen, Zhiyu[1,2],Huang, Jian[1,2]. Design and fabrication of a MEMS high-efficiency NIR-scanning grating based on tilted (1 1 1) silicon wafer[J],2015,72.
APA	Nie, Qiuyu[1,2,3],Wen, Zhiyu[1,2],&Huang, Jian[1,2].(2015).Design and fabrication of a MEMS high-efficiency NIR-scanning grating based on tilted (1 1 1) silicon wafer.,72.
MLA	Nie, Qiuyu[1,2,3],et al."Design and fabrication of a MEMS high-efficiency NIR-scanning grating based on tilted (1 1 1) silicon wafer".72(2015).

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