| A Large-Size MEMS Scanning Mirror for Speckle Reduction Application | |
| Li, Fanya; Zhou, Peng; Wang, Tingting; He, Jiahui; Yu, Huijun; Shen, Wenjiang | |
| 刊名 | MICROMACHINES
 |
| 2017 | |
| 卷号 | 8 |
| 关键词 | microelectronic mechanical system (MEMS) electromagnetic force speckle reduction optical scanning |
| ISSN号 | 2072-666X |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2950467 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Li, Fanya,Zhou, Peng,Wang, Tingting,et al. A Large-Size MEMS Scanning Mirror for Speckle Reduction Application[J]. MICROMACHINES,2017,8. |
| APA | Li, Fanya,Zhou, Peng,Wang, Tingting,He, Jiahui,Yu, Huijun,&Shen, Wenjiang.(2017).A Large-Size MEMS Scanning Mirror for Speckle Reduction Application.MICROMACHINES,8. |
| MLA | Li, Fanya,et al."A Large-Size MEMS Scanning Mirror for Speckle Reduction Application".MICROMACHINES 8(2017). |
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