| High Performance Piezoresistive Accelerometer based on the Slot Etching in the EB(eight-beam) Structure | |
| Wang, Peng; Zhao, Yulong; Zhao, You; Zhang, Qi; Wang, Zixi | |
| 2017 | |
| 关键词 | slots senstivity natrual frequency accelerometer |
| 页码 | 406-409 |
| 会议录 | 2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)
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| URL标识 | 查看原文 |
| ISSN号 | 9781509030590 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2944623 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Wang, Peng,Zhao, Yulong,Zhao, You,et al. High Performance Piezoresistive Accelerometer based on the Slot Etching in the EB(eight-beam) Structure[C]. 见:. |
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