| A Large Size MEMS Scanning Mirror for Speckle Reduction Application | |
| Li, Fanya; He, Jiahui; Shen, Wenjiang; Zhou, Peng; Yu, Huijun; Ma, Fei | |
| 2017 | |
| 关键词 | electromagnetic force speckle reduction optical scanning MEMS |
| 页码 | 539-543 |
| 会议录 | 2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)
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| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2923817 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Li, Fanya,He, Jiahui,Shen, Wenjiang,et al. A Large Size MEMS Scanning Mirror for Speckle Reduction Application[C]. 见:. |
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