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	Investigation of microstructure and properties of ultrathin graded ZrNx self-assembled diffusion barrier in deep nano-vias prepared by plasma ion immersion implantation
	Zou, Jianxiong; Liu, Bo; Lin, Liwei; Lu, Yuanfu; Dong, Yuming; Jiao, Guohua; Ma, Fei; Li, Qiran
刊名	APPLIED SURFACE SCIENCE
	2018
卷号	427页码:950-955
关键词	Cu interconnects Electron energy loss spectroscopy Graded ZrNx barrier Plasma immersion ion implantation
ISSN号	0169-4332
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2922775
专题	西安交通大学
推荐引用方式 GB/T 7714	Zou, Jianxiong,Liu, Bo,Lin, Liwei,et al. Investigation of microstructure and properties of ultrathin graded ZrNx self-assembled diffusion barrier in deep nano-vias prepared by plasma ion immersion implantation[J]. APPLIED SURFACE SCIENCE,2018,427:950-955.
APA	Zou, Jianxiong.,Liu, Bo.,Lin, Liwei.,Lu, Yuanfu.,Dong, Yuming.,...&Li, Qiran.(2018).Investigation of microstructure and properties of ultrathin graded ZrNx self-assembled diffusion barrier in deep nano-vias prepared by plasma ion immersion implantation.APPLIED SURFACE SCIENCE,427,950-955.
MLA	Zou, Jianxiong,et al."Investigation of microstructure and properties of ultrathin graded ZrNx self-assembled diffusion barrier in deep nano-vias prepared by plasma ion immersion implantation".APPLIED SURFACE SCIENCE 427(2018):950-955.

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