Single Neuron Adaptive PID Control of the Silicon-based Integrated Micro Nano-Positioning XY-Stage

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	Single Neuron Adaptive PID Control of the Silicon-based Integrated Micro Nano-Positioning XY-Stage
	Wang, JC ; Rong, WB ; Sun, LN ; Li, XX
刊名	MICRO AND NANO TECHNOLOGY - 1ST INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY(CSMNT)
	2009-01-01
卷号	60-61 页码:207-212
ISSN号	1022-6680
通讯作者	Wang, JC, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai, Peoples R China
学科主题	Materials Science, Multidisciplinary
收录类别	SCI
语种	英语
公开日期	2011-11-08
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/17275]
专题	上海微系统与信息技术研究所_太赫兹、微波射频技术_期刊论文
推荐引用方式 GB/T 7714	Wang, JC,Rong, WB,Sun, LN,et al. Single Neuron Adaptive PID Control of the Silicon-based Integrated Micro Nano-Positioning XY-Stage[J]. MICRO AND NANO TECHNOLOGY - 1ST INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY(CSMNT),2009,60-61:207-212.
APA	Wang, JC,Rong, WB,Sun, LN,&Li, XX.(2009).Single Neuron Adaptive PID Control of the Silicon-based Integrated Micro Nano-Positioning XY-Stage.MICRO AND NANO TECHNOLOGY - 1ST INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY(CSMNT),60-61,207-212.
MLA	Wang, JC,et al."Single Neuron Adaptive PID Control of the Silicon-based Integrated Micro Nano-Positioning XY-Stage".MICRO AND NANO TECHNOLOGY - 1ST INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY(CSMNT) 60-61(2009):207-212.