| PIC/MCC simulation of capacitively coupled discharges in helium: boundary effects | |
| Sun, Anbang; Becker, Markus M.; Loffhagen, D. | |
| 刊名 | PLASMA SOURCES SCIENCE & TECHNOLOGY
 |
| 2018 | |
| 卷号 | 27 |
| 关键词 | boundary effect CCRF discharge PIC/MCC simulation |
| ISSN号 | 0963-0252 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2919333 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Sun, Anbang,Becker, Markus M.,Loffhagen, D.. PIC/MCC simulation of capacitively coupled discharges in helium: boundary effects[J]. PLASMA SOURCES SCIENCE & TECHNOLOGY,2018,27. |
| APA | Sun, Anbang,Becker, Markus M.,&Loffhagen, D..(2018).PIC/MCC simulation of capacitively coupled discharges in helium: boundary effects.PLASMA SOURCES SCIENCE & TECHNOLOGY,27. |
| MLA | Sun, Anbang,et al."PIC/MCC simulation of capacitively coupled discharges in helium: boundary effects".PLASMA SOURCES SCIENCE & TECHNOLOGY 27(2018). |
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