磁控溅射 MoSiCN 硬质薄膜的制备与性能

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	磁控溅射 MoSiCN 硬质薄膜的制备与性能
	吕鹏辉; 吕鹏辉; 吕鹏辉; 吕鹏辉
	2010-06-01
关键词	纳米复合
学科主题	其他
中文摘要	MoSiCN films were deposited on the silicon and stainless steel wafers by reactive magnetron sputtering under a bias voltage of −100 V. The structures and mechanical properties of the MoSiCN films were investigated by XRD, XPS, TGA and Nano–indenter, scratch test. It was found that Si contents were closely correlated to the structures of the anocomposite films. We have found that nanocomposite coatings are composed of nanocrystalline MoCNx in a matrix of amorphous SiCN. The hardness of as–deposited films exhibits a maximum hardness at 30 GPa, as evaluated by nanoindentor XP. The oxidation resistance temperature of the film is about 1100 ℃, according to the TGA measurements. Salt spray test of the MoSiCN coatings was also carried out, which exhibited a corrosion time of over 150 h.
资助信息	NIMTE-CAS
语种	中文
内容类型	其他
源URL	[http://ir.las.ac.cn/handle/12502/3186]
专题	文献情报中心_学术报告会_演示报告
推荐引用方式 GB/T 7714	吕鹏辉,吕鹏辉,吕鹏辉,等. 磁控溅射 MoSiCN 硬质薄膜的制备与性能. 2010-06-01.