Pattern quality and defect evaluation based on cross correlation and power spectral density methods

	Pattern quality and defect evaluation based on cross correlation and power spectral density methods
	Zhang LB(张利斌); Ma L(马乐); Chen R(陈睿); He JF(何建芳); Su XJ(苏晓菁); Dong LS(董立松); Su YJ(粟雅娟); Wei YY(韦亚一)
刊名	J Vac Sci Technol B
	2018-08-30
文献子类	期刊论文
语种	英语
内容类型	期刊论文
源URL	[http://159.226.55.107/handle/172511/19064]
专题	微电子研究所_集成电路先导工艺研发中心
作者单位	中国科学院微电子研究所
推荐引用方式 GB/T 7714	Zhang LB,Ma L,Chen R,et al. Pattern quality and defect evaluation based on cross correlation and power spectral density methods[J]. J Vac Sci Technol B,2018.
APA	Zhang LB.,Ma L.,Chen R.,He JF.,Su XJ.,...&Wei YY.(2018).Pattern quality and defect evaluation based on cross correlation and power spectral density methods.J Vac Sci Technol B.
MLA	Zhang LB,et al."Pattern quality and defect evaluation based on cross correlation and power spectral density methods".J Vac Sci Technol B (2018).