Fabricating metal structures with taper angles and smooth sidewalls

	Fabricating metal structures with taper angles and smooth sidewalls
	Li JF(李俊峰); Wang WB(王玮冰); Li JJ(李俊杰); Zhao C(赵超); He XB(贺晓彬); Yu JH(余嘉晗); Zhou N(周娜); Jiang QF(姜齐风); Fu JY(傅剑宇)
刊名	Journal of Micromechanics and Microengineering
	2017-11-07
文献子类	期刊论文
语种	英语
内容类型	期刊论文
源URL	[http://159.226.55.106/handle/172511/17986]
专题	微电子研究所_集成电路先导工艺研发中心
作者单位	中国科学院微电子研究所
推荐引用方式 GB/T 7714	Li JF,Wang WB,Li JJ,et al. Fabricating metal structures with taper angles and smooth sidewalls[J]. Journal of Micromechanics and Microengineering,2017.
APA	Li JF.,Wang WB.,Li JJ.,Zhao C.,He XB.,...&Fu JY.(2017).Fabricating metal structures with taper angles and smooth sidewalls.Journal of Micromechanics and Microengineering.
MLA	Li JF,et al."Fabricating metal structures with taper angles and smooth sidewalls".Journal of Micromechanics and Microengineering (2017).