Effect of Annealing on the Characteristics of Ti/Al Ohmic Contacts to p-Type 4H-SiC

	Effect of Annealing on the Characteristics of Ti/Al Ohmic Contacts to p-Type 4H-SiC
	Bai Y(白云); Liu XY(刘新宇); Tang YD(汤益丹); Shen HJ(申华军); Zhang XF(张旭芳); Guo F(郭飞); Peng CY(彭朝阳)
刊名	Materials Science Forum
	2017-05-15
文献子类	期刊论文
内容类型	期刊论文
源URL	[http://159.226.55.106/handle/172511/18009]
专题	微电子研究所_高频高压器件与集成研发中心
作者单位	中国科学院微电子研究所
推荐引用方式 GB/T 7714	Bai Y,Liu XY,Tang YD,et al. Effect of Annealing on the Characteristics of Ti/Al Ohmic Contacts to p-Type 4H-SiC[J]. Materials Science Forum,2017.
APA	Bai Y.,Liu XY.,Tang YD.,Shen HJ.,Zhang XF.,...&Peng CY.(2017).Effect of Annealing on the Characteristics of Ti/Al Ohmic Contacts to p-Type 4H-SiC.Materials Science Forum.
MLA	Bai Y,et al."Effect of Annealing on the Characteristics of Ti/Al Ohmic Contacts to p-Type 4H-SiC".Materials Science Forum (2017).