Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 工艺装备与智能机器人研究室

	Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry
	Qu, XH(曲兴华)2; Peng B(彭博)2; Zhao, Xianyu 2; Zhang TY(张天宇)1; Tang, Guoqing 2; Zhang FM(张福民)2
刊名	IEEE Photonics Technology Letters
	2019
卷号	31 期号:15 页码:1285-1288
关键词	Ultrafast optics measurement dispersive interferometry EIIT
ISSN号	10411-135
产权排序	2
英文摘要	Method to accurately measure both refractive index and the thickness of glass is investigated. The method combines equal inclination interference with dispersive interferometry. The interference signal, which is detected by the spectrometer, contains different frequencies and can be demodulated with high accuracy. The experiments indicate that the standard deviation of the thickness is better than the 35 nm, while the standard deviation of the measured refractive indices is below 5.76 × 10-6. Furthermore, absolute angles, between 0° and 51°, can be measured with a repeatability within 5′.
WOS关键词	GROUP REFRACTIVE-INDEX ; DISTANCE MEASUREMENT ; ARBITRARY DISTANCE ; LONG ; AIR
WOS研究方向	Engineering ; Optics ; Physics
语种	英语
WOS记录号	WOS:000476796700022
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/25310]
专题	工艺装备与智能机器人研究室
作者单位	1.Shenyang Institute of Automation, Shenyang 110016, China 2.Tianjin University, Tianjin 300072, China
推荐引用方式 GB/T 7714	Qu, XH,Peng B,Zhao, Xianyu,et al. Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry[J]. IEEE Photonics Technology Letters,2019,31(15):1285-1288.
APA	Qu, XH,Peng B,Zhao, Xianyu,Zhang TY,Tang, Guoqing,&Zhang FM.(2019).Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry.IEEE Photonics Technology Letters,31(15),1285-1288.
MLA	Qu, XH,et al."Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry".IEEE Photonics Technology Letters 31.15(2019):1285-1288.