Modifications of SiC under high fluence Kr-ion irradiation at different temperatures
Yao, Cunfeng2; Shen, Tielong2; Wang, Zhiguang2; He, Chaohui1; Xi, Jianqi1; Guo, Daxi1; Yang, Tao1; Zang, Hang1; Zhang, Peng1; Pang, Lilong2
2013-07-15
关键词SiC Heavy-ion irradiation Raman Mechanical property High fluence
卷号307
DOI10.1016/j.nimb.2012.11.089
页码558-561
英文摘要4 MeV Kr-ions were irradiated into 6H-SiC single crystals with fluences from 1.0 x 10(16) to 5.0 x 10(16) cm(-2) at room temperature, 300 degrees C and 500 degrees C, respectively (5.0 x 10(16) cm(-2) at 550 degrees C). The irradiation-induced modifications were measured by Atomic Force Microscope (AFM), Raman Spectrometer and Nano-indentation measurements. It was observed that the surface of RT-irradiated samples became rough as a result of crystallizing to amorphous state. The result of Raman spectra indicates that different migration behaviors of Si and C interstitials at different temperatures could have an effect on the stoichiometry of irradiated samples. It was also observed that the hardness of irradiated samples is higher than that of un-irradiated ones at high temperatures, with increase at low fluence and then decrease at high fluence. Finally, the effects of irradiation temperature and ion fluence are discussed. (C) 2013 Elsevier B.V. All rights reserved.
会议录NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
会议录出版者ELSEVIER SCIENCE BV
会议录出版地PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS
语种英语
WOS研究方向Instruments & Instrumentation ; Nuclear Science & Technology ; Physics
WOS记录号WOS:000321722200123
内容类型会议论文
源URL[http://119.78.100.186/handle/113462/57516]  
专题近代物理研究所_先进核能材料研究室(ADS)
通讯作者He, Chaohui
作者单位1.Xi An Jiao Tong Univ, Dept Nucl Sci & Technol, Xian 710049, Peoples R China
2.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China
推荐引用方式
GB/T 7714
Yao, Cunfeng,Shen, Tielong,Wang, Zhiguang,et al. Modifications of SiC under high fluence Kr-ion irradiation at different temperatures[C]. 见:.
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