Structure and deuterium retention properties of tungsten layers deposited by plasma sputtering in a mixed atmosphere of D-2 and He

doi:10.1016/j.jnucmat.2013.12.008

	Structure and deuterium retention properties of tungsten layers deposited by plasma sputtering in a mixed atmosphere of D-2 and He
	Tang, X. H.1,2; Shi, L. Q.1,2; O'Connor, D. J.3; King, B.3
刊名	JOURNAL OF NUCLEAR MATERIALS
	2014-03-01
卷号	446 页码:200-207
ISSN号	0022-3115
DOI	10.1016/j.jnucmat.2013.12.008
文献子类	Article
英文摘要	The influence of the deposition conditions on the surface morphology, crystal structure and deuterium retention of the tungsten layers formed by rf magnetron plasma sputtering in mixed atmosphere of D-2, He and Ar, has been carried out. Helium containing deuterated tungsten layers (named He-WDx) on Cu/Si substrate demonstrate serious film damages with zones of cracks, fractures, flaking-off and large surface blisters. However, these kinds of damages do not happen on the He-WDx layers performed on mechanically polished polycrystalline Cu substrates because of larger surface roughness of the substrates. The crystal structure of the W layer greatly changes with the additional He in the layer, and large amounts of defects resulting in lattice expansion and X-diffraction peak broadening were produced in the W crystal. He in the W layer has direct impacts on D retention. Both D and He concentrations vary simultaneously with He fraction, attached negative bias and substrate temperature. Crown Copyright (C) 2013 Published by Elsevier B.V. All rights reserved.
WOS关键词	HELIUM ; HYDROGEN ; COMPONENTS ; DAMAGE ; IONS
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000331662400027
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/49703]
专题	中国科学院近代物理研究所
通讯作者	Shi, L. Q.
作者单位	1.Fudan Univ, Inst Modern Phys, Appl Ion Beam Phys Lab, Shanghai 200433, Peoples R China 2.Fudan Univ, Dept Nucl Sci & Technol, Shanghai 200433, Peoples R China 3.Univ Newcastle, Sch Math & Phys Sci, Callaghan, NSW 2308, Australia
推荐引用方式 GB/T 7714	Tang, X. H.,Shi, L. Q.,O'Connor, D. J.,et al. Structure and deuterium retention properties of tungsten layers deposited by plasma sputtering in a mixed atmosphere of D-2 and He[J]. JOURNAL OF NUCLEAR MATERIALS,2014,446:200-207.
APA	Tang, X. H.,Shi, L. Q.,O'Connor, D. J.,&King, B..(2014).Structure and deuterium retention properties of tungsten layers deposited by plasma sputtering in a mixed atmosphere of D-2 and He.JOURNAL OF NUCLEAR MATERIALS,446,200-207.
MLA	Tang, X. H.,et al."Structure and deuterium retention properties of tungsten layers deposited by plasma sputtering in a mixed atmosphere of D-2 and He".JOURNAL OF NUCLEAR MATERIALS 446(2014):200-207.