Fabrication of different pore shapes by multi-step etching technique in ion-irradiated PET membranes

doi:10.1016/j.nimb.2014.04.011

	Fabrication of different pore shapes by multi-step etching technique in ion-irradiated PET membranes
	Mo, D.1 ; Liu, J. D.1; Duan, J. L.1; Yao, H. J.1; Latif, H.2; Cao, D. L.1; Chen, Y. H.1; Zhang, S. X.1; Zhai, P. F.1; Liu, J.1
刊名	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
	2014-08-15
卷号	333 页码:58-63
关键词	Heavy Ion irradiatIon Polyethylene Terephthalate Ion Track Membrane Pore Shape Multi-step Etching
ISSN号	0168-583X
DOI	10.1016/j.nimb.2014.04.011
文献子类	Article
英文摘要	A method for the fabrication of different pore shapes in polyethylene terephthalate (PET)-based track etched membranes (TEMs) is reported. A multi-step etching technique involving etchant variation and track annealing was applied to fabricate different pore shapes in PET membranes. PET foils of 12-mu m thickness were irradiated with Bi ions (kinetic energy 9.5 MeV/u, fluence 10(6) ions/cm(2)) at the Heavy Ion Research Facility (HIRFL, Lanzhou). The cross-sections of fundamental pore shapes (cylinder, cone, and double cone) were analyzed. Funnel-shaped and pencil-shaped pores were obtained using a two-step etching process. Track annealing was carried out in air at 180 degrees C for 120 min. After track annealing, the selectivity of the etching process decreased, which resulted in isotropic etching in subsequent etching steps. Rounded cylinder and rounded cone shapes were obtained by introducing a track-annealing step in the etching process. Cup and spherical funnel-shaped pores were fabricated using a three- and four-step etching process, respectively. The described multi-step etching technique provides a controllable method to fabricate new pore shapes in TEMs. Introduction of a variety of pore shapes may improve the separation properties of TEMs and enrich the series of TEM products. (C) 2014 Elsevier B.V. All rights reserved.
资助项目	West Light project and technological cooperation project for Wuhan Province (the Chinese Academy of Sciences), National Natural Science Foundation of China[11205215] ; West Light project and technological cooperation project for Wuhan Province (the Chinese Academy of Sciences), National Natural Science Foundation of China[11275237]
WOS关键词	HEAVY-IONS ; TRACK STRUCTURE ; LATENT ; MICRO ; MICROFILTRATION ; POLYCARBONATE ; POLYIMIDE ; NANOPORE
WOS研究方向	Instruments & Instrumentation ; Nuclear Science & Technology ; Physics
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000339137600008
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/49633]
专题	中国科学院近代物理研究所
通讯作者	Mo, D.
作者单位	1.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China 2.Forman Christian Coll, Dept Phys, Lahore 54600, Pakistan
推荐引用方式 GB/T 7714	Mo, D.,Liu, J. D.,Duan, J. L.,et al. Fabrication of different pore shapes by multi-step etching technique in ion-irradiated PET membranes[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2014,333:58-63.
APA	Mo, D..,Liu, J. D..,Duan, J. L..,Yao, H. J..,Latif, H..,...&Liu, J..(2014).Fabrication of different pore shapes by multi-step etching technique in ion-irradiated PET membranes.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,333,58-63.
MLA	Mo, D.,et al."Fabrication of different pore shapes by multi-step etching technique in ion-irradiated PET membranes".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 333(2014):58-63.