The modification of LiTaO3 crystal by low-energy He-ion implantation

doi:10.1016/j.nimb.2012.09.003

	The modification of LiTaO3 crystal by low-energy He-ion implantation
	Pang, L. L.1; Wang, Z. G.1; Jin, Y. F.1; Yao, C. F.1; Cui, M. H.1,2; Sun, J. R.1; Shen, T. L.1,2; Wei, K. F.1; Zhu, Y. B.1,2; Sheng, Y. B.1
刊名	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
	2012-11-01
卷号	290 页码:54-58
关键词	Lithium Tantalate He Implantation Transmittance Surface Defect
ISSN号	0168-583X
DOI	10.1016/j.nimb.2012.09.003
文献子类	Article
英文摘要	The effects of He-ion implantation on the surface morphology and transmittance of LiTaO3 single crystals are investigated. The samples were implanted with 250 key He-ion at different fluences at room temperature. The results show that the surface morphology and transmittance of implanted samples strongly depend on the ion fluence and the time when the samples expose to the air up to 60 days. When the fluence is above 1.0 x 10(16) He+/cm(2), the transmission spectra indicate that a high concentration of defects is created. 3D-profile images show that at the higher fluence a great many triangular stripes appear on the surface of the samples. After 60 days, the recovery of the transmittance occurs and varies with the fluence. For the sample at the fluence of 5.0 x 10(16) He+/cm(2), the raised stripes on the surface evolve into narrow cracks. Regional exfoliation, however, occurs on the surface of the sample with the fluence of 1.0 x 10(17) He+/cm(2). According to the experimental results and simulation of SRIM 2008 code, the evolvement of defects and the behavior of He are discussed. Published by Elsevier B.V.
资助项目	National Natural Science Foundation of China[10835010]
WOS关键词	INSULATOR MATERIAL TECHNOLOGY ; THIN-FILM TRANSFER ; LITHIUM TANTALATE ; WAVE-GUIDES ; HELIUM ; LINBO3 ; FABRICATION ; MICROSCOPY
WOS研究方向	Instruments & Instrumentation ; Nuclear Science & Technology ; Physics
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000311466500010
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/48981]
专题	中国科学院近代物理研究所
通讯作者	Wang, Z. G.
作者单位	1.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Pang, L. L.,Wang, Z. G.,Jin, Y. F.,et al. The modification of LiTaO3 crystal by low-energy He-ion implantation[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2012,290:54-58.
APA	Pang, L. L..,Wang, Z. G..,Jin, Y. F..,Yao, C. F..,Cui, M. H..,...&Li, Y. F..(2012).The modification of LiTaO3 crystal by low-energy He-ion implantation.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,290,54-58.
MLA	Pang, L. L.,et al."The modification of LiTaO3 crystal by low-energy He-ion implantation".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 290(2012):54-58.