Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam | |
Fu, Jiao; Zhu, Tianfei; Liang, Yan; Liu, Zhangcheng; Wang, Ruozheng; Zhang, Xiaofan; Wang, Hong-Xing | |
刊名 | SCIENTIFIC REPORTS |
2019 | |
卷号 | 9 |
ISSN号 | 2045-2322 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2827580 |
专题 | 西安交通大学 |
推荐引用方式 GB/T 7714 | Fu, Jiao,Zhu, Tianfei,Liang, Yan,et al. Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam[J]. SCIENTIFIC REPORTS,2019,9. |
APA | Fu, Jiao.,Zhu, Tianfei.,Liang, Yan.,Liu, Zhangcheng.,Wang, Ruozheng.,...&Wang, Hong-Xing.(2019).Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam.SCIENTIFIC REPORTS,9. |
MLA | Fu, Jiao,et al."Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam".SCIENTIFIC REPORTS 9(2019). |
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