Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire

	Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire
	Shuai Yang; Yujie Ai; Yun Zhang; Zhe Cheng; Lian Zhang; Lifang Jia; Boyu Dong; Baohui Zhang; Junxi Wang
刊名	Journal of Micromechanics & Microengineering
	2018
卷号	28 期号:8 页码:085005
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/29267]
专题	半导体研究所_固态光电信息技术实验室
推荐引用方式 GB/T 7714	Shuai Yang;Yujie Ai;Yun Zhang;Zhe Cheng;Lian Zhang;Lifang Jia;Boyu Dong;Baohui Zhang;Junxi Wang. Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire[J]. Journal of Micromechanics & Microengineering,2018,28(8):085005.
APA	Shuai Yang;Yujie Ai;Yun Zhang;Zhe Cheng;Lian Zhang;Lifang Jia;Boyu Dong;Baohui Zhang;Junxi Wang.(2018).Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire.Journal of Micromechanics & Microengineering,28(8),085005.
MLA	Shuai Yang;Yujie Ai;Yun Zhang;Zhe Cheng;Lian Zhang;Lifang Jia;Boyu Dong;Baohui Zhang;Junxi Wang."Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire".Journal of Micromechanics & Microengineering 28.8(2018):085005.