A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing

	A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing
	Xiaochen Liu; Lihao Wang; Yinfang Zhu; Junyuan Zhao; Jinying Zhang; Jinling Yang; Fuhua Yang
刊名	Journal of Micromechanics & Microengineering
	2018
卷号	28 期号:11 页码:115003
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/29018]
专题	半导体研究所_半导体集成技术工程研究中心
推荐引用方式 GB/T 7714	Xiaochen Liu;Lihao Wang;Yinfang Zhu;Junyuan Zhao;Jinying Zhang;Jinling Yang;Fuhua Yang. A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing[J]. Journal of Micromechanics & Microengineering,2018,28(11):115003.
APA	Xiaochen Liu;Lihao Wang;Yinfang Zhu;Junyuan Zhao;Jinying Zhang;Jinling Yang;Fuhua Yang.(2018).A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing.Journal of Micromechanics & Microengineering,28(11),115003.
MLA	Xiaochen Liu;Lihao Wang;Yinfang Zhu;Junyuan Zhao;Jinying Zhang;Jinling Yang;Fuhua Yang."A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing".Journal of Micromechanics & Microengineering 28.11(2018):115003.