Research on the optimization method of top-drive variable-capacitance   micromotors

doi:10.1007/s00542-014-2348-8

CORC > 北京大学 > 工学院

	Research on the optimization method of top-drive variable-capacitance micromotors
	He, Guangping ; Zhao, Quanliang ; Geng, Zhiyong
刊名	MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
	2015
关键词	POLYSILICON WOBBLE MOTOR ELECTROSTATIC MICROMOTORS MEMS FABRICATION DESIGN RELIABILITY
DOI	10.1007/s00542-014-2348-8
英文摘要	As a class of important MEMS devices, electrostatic micromotors can be used as a platform for developing micropumps, microgyroscopes, micro propeller, and micro medical tools etc. The researches about the electrostatic micromotors in the past twenty years were mainly focused on the actuation principle and fabrication technics. In this paper, the optimal design method for top-drive variable capacitance electrostatic micromotors (TDVCM) is investigated and an analytical model for calculating the output torque of the TDVCM is presented. Using the analytical model, the design parameters of TDVCM can be optimized without the finite element analysis, such that the design procedure has better efficiency in calculation time. In order to verify the numerical calculation accuracy of the method proposed in this paper, the optimizing procedure of an 8/6 TDVCM with various kinds of simple excitation schemes is presented, and the optimization results are verified by the finite element analysis.; Nature Science Foundation of China [50975004, 51305005, 51375016]; Beijing Nature Science Foundation; SCI(E); EI; ARTICLE; hegp55@126.com; 11; 2443-2453; 21
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/415387]
专题	工学院
推荐引用方式 GB/T 7714	He, Guangping,Zhao, Quanliang,Geng, Zhiyong. Research on the optimization method of top-drive variable-capacitance micromotors[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2015.
APA	He, Guangping,Zhao, Quanliang,&Geng, Zhiyong.(2015).Research on the optimization method of top-drive variable-capacitance micromotors.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS.
MLA	He, Guangping,et al."Research on the optimization method of top-drive variable-capacitance micromotors".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2015).