Diode-based microbolometer with performance enhanced by broadband   metamaterial absorber

doi:10.1364/OL.41.002974

CORC > 北京大学 > 信息科学技术学院

	Diode-based microbolometer with performance enhanced by broadband metamaterial absorber
	Ma, Wei ; Jia, Delin ; Wen, Yongzheng ; Yu, Xiaomei ; Feng, Yun ; Zhao, Yuejin
刊名	OPTICS LETTERS
	2016
关键词	FILMS ABSORPTION DETECTORS
DOI	10.1364/OL.41.002974
英文摘要	This Letter reports a microbolometer integrated with a broadband metamaterial absorber (MMA) to enhance its performance, which contains series-connected silicon diodes as the temperature sensor. The broadband MMA is readily integrated into the device by introducing an array of different-sized square resonators on the silicon nitride structural layer, while the widened titanium interconnecting wires between individual diodes serve as the ground plane. In a comparative experiment, the broadband MMA was demonstrated to be superior to the ordinary silicon nitride absorber in a broad spectra range, especially in a long-wavelength IR regime, which directly leads to an increase in IR responsivity by 60%. More importantly, this enhancement in responsivity was achieved with no sacrifice of the response time due to the negligible thermal mass of the introduced resonator array. (C) 2016 Optical Society of America; National Natural Science Foundation of China (NSFC) [61275104, 61575003]; SCI(E); EI; ARTICLE; yuxm@pku.edu.cn; 13; 2974-2977; 41
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/492057]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Ma, Wei,Jia, Delin,Wen, Yongzheng,et al. Diode-based microbolometer with performance enhanced by broadband metamaterial absorber[J]. OPTICS LETTERS,2016.
APA	Ma, Wei,Jia, Delin,Wen, Yongzheng,Yu, Xiaomei,Feng, Yun,&Zhao, Yuejin.(2016).Diode-based microbolometer with performance enhanced by broadband metamaterial absorber.OPTICS LETTERS.
MLA	Ma, Wei,et al."Diode-based microbolometer with performance enhanced by broadband metamaterial absorber".OPTICS LETTERS (2016).