High-Performance Flexible Tin-Zinc-Oxide Thin-Film Transistors   Fabricated on Plastic Substrates

doi:10.1109/TED.2016.2582524

CORC > 北京大学 > 信息科学技术学院

	High-Performance Flexible Tin-Zinc-Oxide Thin-Film Transistors Fabricated on Plastic Substrates
	Han, Dedong ; Chen, Zhuofa ; Cong, Yingying ; Yu, Wen ; Zhang, Xing ; Wang, Yi
刊名	IEEE TRANSACTIONS ON ELECTRON DEVICES
	2016
关键词	Flexible high performance tin-zinc-oxide (TZO) thin film transistor (TFT) A-IGZO TFTS GLASS SUBSTRATE MOBILITY
DOI	10.1109/TED.2016.2582524
英文摘要	Full transparent high-performance tin-zinc-oxide thin-film transistors (TZO TFTs) had been successfully fabricated on flexible plastic substrate by radio frequency (RF) sputtering. Excellent properties of TZO TFT with L-G = 10 mu m gate length were realized, namely high saturation mobility (mu(s)) of 175 cm(2)/V . s, high linear mobility (mu(l)) of 127 cm(2)/V . s, a suitable threshold voltage (V-th) of 1.81 V, a steep subthreshold swing (SS) of 220 mV/decade, an ON/OFF current ratio (I-ON/I-OFF) of similar to 1 x 10(8), and good transmittance of 91.9%, which compare favorably to those made on glass substrates. Mechanical stability of flexible TZO TFTs was investigated by bending tests. The flexible TZO TFTs exhibited good electrical performance, good uniformity, and good flexibility. Thereby, we demonstrated the feasibility of high-performance TZO TFTs for flexible display applications.; National Basic Research Program of China (973 program) [2013CBA01604]; National Natural Science Foundation of China [61275025]; SCI(E); EI; ARTICLE; handedong@pku.edu.cn; 595383099@qq.com; xuanyechangpu@163.com; 710343227@qq.com; zhx@pku.edu.cn; wangyi@ime.pku.edu.cn; 8; 3360-3363; 63
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/491744]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Han, Dedong,Chen, Zhuofa,Cong, Yingying,et al. High-Performance Flexible Tin-Zinc-Oxide Thin-Film Transistors Fabricated on Plastic Substrates[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES,2016.
APA	Han, Dedong,Chen, Zhuofa,Cong, Yingying,Yu, Wen,Zhang, Xing,&Wang, Yi.(2016).High-Performance Flexible Tin-Zinc-Oxide Thin-Film Transistors Fabricated on Plastic Substrates.IEEE TRANSACTIONS ON ELECTRON DEVICES.
MLA	Han, Dedong,et al."High-Performance Flexible Tin-Zinc-Oxide Thin-Film Transistors Fabricated on Plastic Substrates".IEEE TRANSACTIONS ON ELECTRON DEVICES (2016).