Patterned growth of tungsten diselenide flakes by chemical vapor   deposition

doi:10.7567/JJAP.56.080303

CORC > 北京大学 > 信息科学技术学院

	Patterned growth of tungsten diselenide flakes by chemical vapor deposition
	Wang, Zhendong ; Huang, Qi ; Chen, Peng ; Wang, Jianyu ; Lu, Yan ; Zhang, Sihong ; Liang, Xuelei ; Wang, Li
刊名	JAPANESE JOURNAL OF APPLIED PHYSICS
	2017
关键词	TRANSITION-METAL DICHALCOGENIDES CONTROLLED LOCATIONS ATOMIC LAYERS MOS2 MONOLAYER WS2 CONTACTS GRAPHENE
DOI	10.7567/JJAP.56.080303
英文摘要	By introducing prepatterned Pt/Ti dots, arrays of WSe2 flakes have been successfully grown on SiO2 substrates by chemical vapor deposition, opening a new pathway for the large-scale production of WSe2-based devices. The WSe2 flakes are high-quality single crystals characterized by transmission electron microscopy and Raman spectroscopy. Field-effect transistors were fabricated on these WSe2 flakes, and the field effect mobility was measured to be 11.0 cm(2) V(-1)s(-1) and an on/off ratio of similar to 10(6) was achieved. The growth of highly patterned WSe2 flake arrays facilitates the fabrication of WSe2 flake-based integrated devices. (C) 2017 The Japan Society of Applied Physics.; Natural Science Foundation of China [61474059, U1432129, 11504158]; National Key Basic Research Program of China [2013CB934200]; National Key Research and Development Program [2016YFA0201902]; SCI(E); ARTICLE; 8; 56
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/471929]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, Zhendong,Huang, Qi,Chen, Peng,et al. Patterned growth of tungsten diselenide flakes by chemical vapor deposition[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2017.
APA	Wang, Zhendong.,Huang, Qi.,Chen, Peng.,Wang, Jianyu.,Lu, Yan.,...&Wang, Li.(2017).Patterned growth of tungsten diselenide flakes by chemical vapor deposition.JAPANESE JOURNAL OF APPLIED PHYSICS.
MLA	Wang, Zhendong,et al."Patterned growth of tungsten diselenide flakes by chemical vapor deposition".JAPANESE JOURNAL OF APPLIED PHYSICS (2017).