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	2×2 Torsion-Mirror Optical Switch Arrays with Monolithically Integrated Fiber Holding Structures; 2×2 Torsion-Mirror Optical Switch Arrays with Monolithically Integrated Fiber Holding Structures
	Wengang Wu ; Yilong Hao ; Peiyu Zhang ; Guoying Wu
	2001
关键词	mirrors switches holding switching torsion Mirror suspended steps incident lifetime mirrors switches holding switching torsion Mirror suspended steps incident lifetime
英文摘要	Novel 2x2 torsion-mirror optical switch arrays with monolithically integrated fiber holding structures are fabricated using the mixed micromachining based on the surface and bulk silicon microelectronics. Polysilicon micro-mirrors supported by suspended torsion beams are designed as the movable p...; Novel 2x2 torsion-mirror optical switch arrays with monolithically integrated fiber holding structures are fabricated using the mixed micromachining based on the surface and bulk silicon microelectronics. Polysilicon micro-mirrors supported by suspended torsion beams are designed as the movable p...; Chinese Institute of Electronics(CIE)、IEEE Beijing Section; 4; Vol.2
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/450504]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wengang Wu,Yilong Hao,Peiyu Zhang,et al. 2×2 Torsion-Mirror Optical Switch Arrays with Monolithically Integrated Fiber Holding Structures, 2×2 Torsion-Mirror Optical Switch Arrays with Monolithically Integrated Fiber Holding Structures. 2001-01-01.

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