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	The design and fabrication of a miniaturized differential-capacitive triaxial accelerometer; The design and fabrication of a miniaturized differential-capacitive triaxial accelerometer
	Xinping Cao ; Dacheng Zhang ; Ru Huang ; Xing Zhang ; Yangyuan Wang
	2001
关键词	Finite element method(FEM) mode squeeze film damping Finite element method(FEM) mode squeeze film damping
英文摘要	A novel triaxial fully-differential-capacitive accelerometer has been designed and fabricated.The accelerometer has three independent yet on a common glass substrate proof-mass detecting the acceleration vector.The designed structures of the accelerometer are analysed in detail theoretically and ...; A novel triaxial fully-differential-capacitive accelerometer has been designed and fabricated.The accelerometer has three independent yet on a common glass substrate proof-mass detecting the acceleration vector.The designed structures of the accelerometer are analysed in detail theoretically and ...; Chinese Institute of Electronics(CIE)、IEEE Beijing Section; 4; Vol.2
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/450499]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Xinping Cao,Dacheng Zhang,Ru Huang,et al. The design and fabrication of a miniaturized differential-capacitive triaxial accelerometer, The design and fabrication of a miniaturized differential-capacitive triaxial accelerometer. 2001-01-01.

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