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	NEMS spectrometer-on-a-chip
	Dong, B. ; Cai, H. ; Tang, M. ; Gu, Y.D. ; Yang, Z.C. ; Jin, Y.F. ; Hao, Y.L. ; Kwong, D.L. ; Liu, A.Q.
	2015
英文摘要	This paper reports a NEMS spectrometer-on-a-chip, which integrates fiber-waveguide coupler and photo detector on a single silicon chip. Spectrometer based on Fourier transform, for the first time, has been miniaturized into a waveguide based silicon photonic chip. The on-chip spectrometer is fabricated by nano-silicon-photonic fabrication processes. It also eliminates moving parts and confine light in nano-waveguides, which can effectively reduce the spectrometer chip size (1 cm × 1 cm) and lower the power consumption (-1). It has high potential applications in biomedical and physical spectroscopy field. ? 2015 IEEE.; EI; 2093-2096
语种	英语
出处	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
DOI标识	10.1109/TRANSDUCERS.2015.7181370
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/436774]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Dong, B.,Cai, H.,Tang, M.,et al. NEMS spectrometer-on-a-chip. 2015-01-01.

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