NEMS spectrometer-on-a-chip | |
Dong, B. ; Cai, H. ; Tang, M. ; Gu, Y.D. ; Yang, Z.C. ; Jin, Y.F. ; Hao, Y.L. ; Kwong, D.L. ; Liu, A.Q. | |
2015 | |
英文摘要 | This paper reports a NEMS spectrometer-on-a-chip, which integrates fiber-waveguide coupler and photo detector on a single silicon chip. Spectrometer based on Fourier transform, for the first time, has been miniaturized into a waveguide based silicon photonic chip. The on-chip spectrometer is fabricated by nano-silicon-photonic fabrication processes. It also eliminates moving parts and confine light in nano-waveguides, which can effectively reduce the spectrometer chip size (1 cm × 1 cm) and lower the power consumption (-1). It has high potential applications in biomedical and physical spectroscopy field. ? 2015 IEEE.; EI; 2093-2096 |
语种 | 英语 |
出处 | 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 |
DOI标识 | 10.1109/TRANSDUCERS.2015.7181370 |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/436774] |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Dong, B.,Cai, H.,Tang, M.,et al. NEMS spectrometer-on-a-chip. 2015-01-01. |
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