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	NEMS actuator driven by electrostatic and optical force with nano-scale resolution
	Huang, J.G. ; Dong, B. ; Tang, M. ; Gu, Y.D. ; Wu, J.H. ; Chen, T.N. ; Yang, Z.C. ; Jin, Y.F. ; Hao, Y.L. ; Kwong, D.L. ; Liu, A.Q.
	2015
英文摘要	We experimentally demonstrate a silicon nano-wire actuator with a nano-scale resolution and tunable actuation range. The nano-scale resolution is obtained through implementing different control regulations, including coarse tuning by the electrostatic force and precision tuning by the optical force. More specially, the optical force enabled silicon nano-wire actuator can break the classical NEMS 1/3 actuation range limit, extending the actuation range to an arbitrary limit in principle. This unique approach not only provides a simple, non-intrusive solution to the tunable air gap of NEMS devices, but also presents an ultra-sensitive optical read out of the mechanical motion. ? 2015 IEEE.; EI; 2109-2112
语种	英语
出处	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
DOI标识	10.1109/TRANSDUCERS.2015.7181374
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/436759]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Huang, J.G.,Dong, B.,Tang, M.,et al. NEMS actuator driven by electrostatic and optical force with nano-scale resolution. 2015-01-01.

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