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	Performance enhancement of bimaterial cantilever focal plane array by metamaterial absorber
	Ma, W. ; Wen, Y. ; Yu, X. ; Liu, X. ; Zhao, Y.
	2015
英文摘要	This paper presents a novel infrared (IR) focal plane array (FPA) with metamaterial absorber (MMA) integrated to enhance its performance. The FPA consists of bimaterial cantilevers fabricated on a glass substrate by a polyimide (PI) sacrificial layer process, thus allowing the optical readout from back side. This reverse configuration of the incident IR radiation and visible light readout avoids the IR energy loss caused by the silicon substrate compared with previous works. In order to further enhance the IR absorption, MMA was conveniently integrated into the FPA pixels with the gold mirror functioning as the ground plane and SiNxstructural layer as the spacer for MMA at the same time. Performance improvement was verified through a comparative tests of FPAs with and without MMA. ? 2015 IEEE.; EI; 319-322
语种	英语
出处	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
DOI标识	10.1109/TRANSDUCERS.2015.7180925
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/436756]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Ma, W.,Wen, Y.,Yu, X.,et al. Performance enhancement of bimaterial cantilever focal plane array by metamaterial absorber. 2015-01-01.

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