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	Advanced conformal parylene fabrication for micro/nano devices
	Wang, Wei ; Liu, Yaoping ; Kang, Dongyang ; Zhang, Lingqian ; Tai, Yu-Chong
	2015
英文摘要	Herein, we reported several advanced parylene fabrication techniques for various micro/nano devices by taking advantages of the conformal deposition capability and overcoming related restrictions when depositing in high aspect ratio structures, including deep-trench filling by Parylene C for thermal isolation in silicon microdevices, parylene molding technique for high porosity filter membrane preparation, Parylene C caulked PDMS (pcPDMS) for low permeability microfluidics applications, and ultra-thin parylene deposition for flexible electronics. ? 2015 IEEE.; EI
语种	英语
出处	14th IEEE SENSORS
DOI标识	10.1109/ICSENS.2015.7370641
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/436399]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, Wei,Liu, Yaoping,Kang, Dongyang,et al. Advanced conformal parylene fabrication for micro/nano devices. 2015-01-01.

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