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	High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer
	Zhang, G. ; Cai, H. ; Gu, Y.D. ; Song, J.F. ; Dong, B. ; Yang, Z.C. ; Jin, Y.F. ; Hao, Y.L. ; Sivalingam, S.P. ; Yap, P.H. ; Kwong, D.L. ; Liu, A.Q.
	2016
英文摘要	An on-chip refractive index (RI) sensor with high sensitivity and large measurement range is demonstrated. The sensing scheme presented here is based on Mach-Zehnder interferometer configuration built on an SOI wafer. The measured wavelength sensitivity reaches 3498.6 nm/RIU (TE-mode). Meanwhile, according to the period changes of interference patterns, the measured period sensitivities are 20.4 nm/RIU (TE-mode) and 61.1 nm/RIU (TM-mode), respectively. Therefore, the fine index change detection limit reaches up to 1.1×10-5 RIU, while the period shift for larger index change detection has a measurement range of several RIU. By making an array, the proposed on-chip sensor has a potential application for multiple samples detection, such as chemical and bio-toxins in drinking water ranging from sub-nanogram to picogram level. ? 2016 IEEE.; EI; 298-301; 2016-February
语种	英语
出处	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
DOI标识	10.1109/MEMSYS.2016.7421619
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/436253]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, G.,Cai, H.,Gu, Y.D.,et al. High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer. 2016-01-01.

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