Cutting and Welding of Nanomaterials with an Electron Beam

CORC > 北京大学 > 信息科学技术学院

	Cutting and Welding of Nanomaterials with an Electron Beam
	S.Y.Xu ; M.L.Tian
刊名	复旦学报. 自然科学版
	2007
关键词	nano-cutting nano-welding electron beam nanowire
英文摘要	Results Scanning tunneling microscope and atomic force microscope have been applied to manipulate individual atoms or clusters on a clean surface.Focused ion beam technique is routinely used to cut materials down to sub-100 nm dimension.However,in between the atomic and the sub-100 nm scales,i.e.,at the nanometer scale,to date there is no well-established physical modification technique.Here we demonstrate that localized,impurity-free nano-welding and nano-cutting techniques with a high-intensity electron beam (HIEM) have a great potential for the fabrication of nanodevices.It is known that an intense electron beam causes various inelastic scattering processes in a target specimen that create heating,amorphization,ablation effects,and,when the intensity is high enough,some nonlinear effects such as plasma formation at the specimen surface.We will show that a HIEB with an intensity of 106 A/cm2 can be applied to create holes,gaps,and other patterns of nanometer dimensions on a single semiconducting or metallic nanowire[1].In particular,the hole-formation process on silicon nanowires under a HIEM will be discussed in detail.We will also show that an electron beam with slightly weaker intensities can be used to weld individual nanowires,forming metal-to-metal or metal-to-semiconductor nanowire junctions.This can be applied to reduce contact resistance between metallic nanowires and leads[2],and,e.g.,to fabricate nano-scale thermal couples.; 中文核心期刊要目总览(PKU); 中国科技核心期刊(ISTIC); 中国科学引文数据库(CSCD); 5; 717; 46
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/424645]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	S.Y.Xu,M.L.Tian. Cutting and Welding of Nanomaterials with an Electron Beam[J]. 复旦学报. 自然科学版,2007.
APA	S.Y.Xu,&M.L.Tian.(2007).Cutting and Welding of Nanomaterials with an Electron Beam.复旦学报. 自然科学版.
MLA	S.Y.Xu,et al."Cutting and Welding of Nanomaterials with an Electron Beam".复旦学报. 自然科学版 (2007).