Effects of substrate temperature on performance of calcium-doped zinc   oxide TFTs

doi:10.1049/el.2015.1089

CORC > 北京大学 > 信息科学技术学院

	Effects of substrate temperature on performance of calcium-doped zinc oxide TFTs
	Yu, Wen ; Han, Dedong ; Shi, Pan ; Cong, Yingying ; Zhang, Yi ; Dong, Junchen ; Zhou, Xiaoliang ; Huang, Lingling ; Cui, Guodong ; Zhang, Shengdong ; Zhang, Xing ; Wang, Yi
刊名	ELECTRONICS LETTERS
	2015
关键词	THIN-FILM TRANSISTORS MOBILITY LAYER
DOI	10.1049/el.2015.1089
英文摘要	In this reported work, high-performance fully transparent bottom-gate-type calcium-doped zinc oxide thin-film transistors (Ca-ZnO TFTs) have been successfully fabricated on glass substrate. The effects of substrate temperature during active layer deposition on the electrical properties of Ca-ZnO TFTs were investigated and an optimum condition (substrate temperature: 100 degrees C) was achieved. The optimised thin-film transistors (TFTs) exhibit excellent electrical properties, with an off-state current (I-off) of 1.31 x 10(-12) A, an I-on/I-off current ratio of 3.015 x 10(8), a saturation mobility (p) of 25 cm(2)/Vs and a threshold voltage (V-t) of 4.24 V. The variation trend of V-t, the I-on/I-off current ratio and mu(sat) against substrate temperatures is analysed in detail. The experimental results suggest that the performance of CaZnO TFTs can be improved effectively by optimum substrate temperature.; National Basic Research Program of China (973 program) [2011CBA00600]; National Natural Science Foundation of China [61275025]; SCI(E); EI; ARTICLE; handedong@pku.edu.cn; 16; 1286-1287; 51
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/417275]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yu, Wen,Han, Dedong,Shi, Pan,et al. Effects of substrate temperature on performance of calcium-doped zinc oxide TFTs[J]. ELECTRONICS LETTERS,2015.
APA	Yu, Wen.,Han, Dedong.,Shi, Pan.,Cong, Yingying.,Zhang, Yi.,...&Wang, Yi.(2015).Effects of substrate temperature on performance of calcium-doped zinc oxide TFTs.ELECTRONICS LETTERS.
MLA	Yu, Wen,et al."Effects of substrate temperature on performance of calcium-doped zinc oxide TFTs".ELECTRONICS LETTERS (2015).