High mobility transparent flexible nickel-doped zinc oxide thin-film   transistors with small subthreshold swing

doi:10.1049/el.2015.2041

CORC > 北京大学 > 信息科学技术学院

	High mobility transparent flexible nickel-doped zinc oxide thin-film transistors with small subthreshold swing
	Huang, Lingling ; Han, Dedong ; Zhang, Yi ; Shi, Pan ; Yu, Wen ; Cui, Guodong ; Cong, Yingying ; Dong, Junchen ; Zhang, Shengdong ; Zhang, Xing ; Wang, Yi
刊名	ELECTRONICS LETTERS
	2015
关键词	high electron mobility transistors nickel semiconductor doping zinc compounds thin film transistors plastics substrates sputtering flexible displays high mobility transparent flexible nickel doped zinc oxide thin-film transistor small subthreshold swing NZO TFT flexible transparent plastic substrate electrical property SS saturation mobility sputtering pressure channel deposition RF magnetron sputtering drain current positive threshold voltage flexible fully transpa
DOI	10.1049/el.2015.2041
英文摘要	High-mobility nickel (Ni)- doped zinc oxide thin-film transistors ( NZO TFTs) have been successfully fabricated on flexible transparent plastic substrates at a low temperature. The devices all exhibited good electrical properties with small subthreshold swing ( SS) and high saturation mobility fabricated under different sputtering pressure ( 0.4, 0.8, 1.2, 1.6 Pa) during channel deposition by RF magnetron sputtering were found. The electrical properties of NZO TFTs reached the best when the sputtering pressure was 1.6 Pa, with an SS of 89 mV/ decade, a saturation mobility of 172 cm(2) center dot V- 1 center dot s- 1, a drain current on/ off ratio of 108, and a positive threshold voltage of 2.36 V. The results show that Nidoped ZnO is a promising candidate for flexible fully transparent displays.; National Basic Research Program of China [2011CBA00600]; National Natural Science Foundation of China (NSFC) [61275025]; SCI(E); EI; ARTICLE; handedong@pku.edu.cn; 20; 1595-+; 51
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/415927]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Huang, Lingling,Han, Dedong,Zhang, Yi,et al. High mobility transparent flexible nickel-doped zinc oxide thin-film transistors with small subthreshold swing[J]. ELECTRONICS LETTERS,2015.
APA	Huang, Lingling.,Han, Dedong.,Zhang, Yi.,Shi, Pan.,Yu, Wen.,...&Wang, Yi.(2015).High mobility transparent flexible nickel-doped zinc oxide thin-film transistors with small subthreshold swing.ELECTRONICS LETTERS.
MLA	Huang, Lingling,et al."High mobility transparent flexible nickel-doped zinc oxide thin-film transistors with small subthreshold swing".ELECTRONICS LETTERS (2015).